Blar i BI Open på forfatter "Hassoun, Michael"
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A Lagrangian heuristic for minimising risk using multiple heterogeneous metrology tools
Dauzère-Pérès, Stéphane; Hassoun, Michael; Sendon, Alejandro (Journal article; Peer reviewed, 2019)Motivated by the high investment and operational metrology cost, and subsequently the limited metrology capacity, in modern semiconductor manufacturing facilities, we model and solve the problem of optimally assigning the ... -
On the importance of variability when managing metrology capacity
Dauzère-Pérès, Stéphane; Hassoun, Michael (Peer reviewed; Journal article, 2020)In-line quality control is a crucial and increasingly constraining activity, in particular in high technology manufacturing. In this paper, we study a single metrology tool assigned to control the production quality of ...